Under the Centre for Sensors and Vision Technology and Controls, a facility for sensor technology development is created. This facility consists of all necessary processes for micro systems packaging, characterization and basic fabrication. All these processes demand clean room environment due to the feature sizes and the cleanliness that is required for the processes to be conducted. Hence to accommodate all these processes, Clean rooms of class 1000 (ISO6), 10000(ISO7) and 100000(ISO8) are created. Class 100(ISO5) is also created under a laminar flow within the ISO8 facility.
The ISO 6 clean rooms are yellow rooms which are dedicated mainly for lithography and fabrication purposes. The other ISO 5, 7 and 8 clean rooms are white light based which support for packaging, characterization and some fabrication. The ISO 5 clean room consists of Flip Chip Bonding, Hot Embossing, and Electroplating. The ISO 6 clean rooms consists of Mask Aligner, Wet benches with spin coating, Mask Writer, Nano Imprint Lithography and wafer bonding. The ISO 7 clean room consists of wire bonding, bond testing and optical characterization.