Salient Features:

• Calibration of Imaging, Optical and Microscopy equipments etc.
• Substitute for import items.
• Coatings: Chrome (bright & anti-reflective), aluminium Iron oxide etc

Specification:

• Size varies from 0.3”x0.3” to 8”x 8”
• Feature to feature accuracy down to 1 μm

Work piece accuracies:

Level of Development:

TRL 7

Status of Commercialization:

Ready for Technology Transfer

Major Raw materials Utilised:

Double side polished Borosilicate, BK7, Soda lime, fused silica and quartz.

Major Plant Equipment and Machines required:

• High Precision Pulsed UV Laser Micromachining System
• Thin film coating system
• High resolution optical microscope

 

Techno economics:

• Indigenous development of technology and having high potential in commercialization of artefacts development
• Thin cost of the calibration masks will be 1/10th of the cost of imported mask with same accuracy.